Recently, Taiwan-based LED wafer and chip manufacturer Tekcore Co Ltd has installed two VaporStation Central Delivery Systems from Dow Electronic Materials of Philadelphia, PA, USA (a business unit of Dow Advanced Materials) in its LED manufacturing area.

Presently, Tekcore is running the first tool in production to deliver trimethylgallium (TMG) to multiple epitaxial growth reactors.

In addition, the second delivery system, Dow’s new patent-pending, third generation of the VaporStation Central Delivery System, has also been installed at Tekcore and ramp up for production has started.

The systems are the first of seven that Tekcore has ordered from Dow Electronic Materials.