Oxford Instruments has received multi-system order of its etch and deposition systems from HBLED Manufacturer, Optogan Group.

These etch and deposition systems include PlasmaPro System133 ICP and PlasmaPro 800Plus RIE etch systems, and a PlasmaPro 800Plus deposition system.

The PlasmaPro System133 process tool offers up to 27 x 2" batch etch capability for GaN on Sapphire wafers, while the PlasmaPro 800Plus tools are a flexible solution for plasma etching and deposition processes on large wafer batches of up to 43 x 2" wafers, in a compact footprint, open-loading system.