Plainview, NY, USA-based Veeco Instruments Inc, an epitaxial deposition and process equipment maker, has introduced three new models of its MOCVD systems for the production of high-brightness LEDs: TurboDisc MaxBright M, TurboDisc MaxBright MHP and TurboDisc K465i HP.

MaxBright M is a modular and more compact version of Veeco’s MaxBright multi-reactor system, providing easier serviceability and up to 15% improved footprint efficiency. It also features improved layout configuration flexibility to accommodate various fab spacing requirements.

MaxBright MHP is a high-performance version of the new modular ‘M’, providing as much as 20% within-wafer wavelength uniformity improvement over MaxBright. Higher yields are achieved from technology advancements that result in improved thermal and flow capability. The MHP also provides lower cost of ownership compared with MaxBright.

K465i HP is a high-performance option for Veeco’s existing K465i single-reactor MOCVD system, delivering up to 20% within-wafer wavelength uniformity improvement as well as lower cost of ownership.

The new systems are available in 2”, 4”, 6” and 8”-wafer configurations. Existing MaxBright and K465i systems are easily field-upgradeable to the high-performance HP option. Veeco says that all of its MOCVD systems feature its low-maintenance TurboDisc technology, which enables what is reckoned to be the highest system availability and throughput.

According to analyst firm IMS Research, the existing K465i (introduced in 2010) was the top selling MOCVD tool that year, and the MaxBright (launched in 2011) was the top seller last year.