Veeco Instruments Inc., the global leader in process equipment solutions for data storage,
LED, solar and other advanced manufacturers, extended its market-leading TurboDisc® MOCVD systems for the production of high brightness
LEDs with three new models: TurboDisc MaxBright® M™, TurboDisc MaxBright MHP™ and TurboDisc K465i HP™.
MaxBright M: a modular and more compact version of Veeco’s multi-reactor system. The MaxBright M provides easier serviceability and up to 15% improved footprint efficiency compared to MaxBright, and nearly 40% better footprint efficiency compared to competitive MOCVD systems. It also features improved layout configuration flexibility to accommodate various fab spacing requirements.
MaxBright MHP: a high performance version of the new modular “M.” The MaxBright MHP provides as much as 20% wavelength uniformity improvement over MaxBright. Higher yields are achieved from technology advancements that result in improved thermal and flow capability. The MaxBright MHP also provides lower cost of ownership as compared to MaxBright.
K465i HP: a high performance option for Veeco’s single-reactor MOCVD system which delivers up to 20% wavelength uniformity improvement compared to the K465i and lower cost of ownership.
These new systems are available in 2, 4, 6 and 8” configurations. Existing MaxBright and K465i systems are easily field-upgradeable to the high performance HP option. All of Veeco’s MOCVD systems feature its low maintenance TurboDisc technology, which enables highest system availability and throughput.