Edwards (NASDAQ: EVAC), a leading global supplier of integrated solutions for the manufacture of semiconductors, flat panel displays, LEDs and solar cells, has introduced the new iXH645H dry vacuum pump which requires minimal maintenance and maximizes uptime in harsh manufacturing environments. The new pump has been optimized for MOCVD processes used in LED manufacturing, as well as for compound semiconductor manufacturing using III-V materials in gate stacks.
 
The iXH645H delivers very high gas flow capability and is able to operate continuously at the high loads required for the latest-generation LED manufacturing tools. The advanced technology of the iXH pump minimizes maintenance requirements and maximizes pump uptimes, helping to lower cost-of-ownership.
 
“This new addition to our iXH family of dry pumps is designed to address the needs of two rapidly growing segments of high technology manufacturing,” said Wei Shao, Edwards’ LED market sector manager. “Due to their superior lighting efficiency, LEDs are increasingly being seen as an environmentally-friendly alternative to incandescent lighting, as shown by recent legislation passed in China, Korea, Japan and the U.K to phase out traditional high power lighting.”
 
Shao adds, “At the same time, the use of III-V materials in compound semiconductor manufacturing is enabling the continuation of Moore’s Law to next-generation design nodes.”