Rubicon technology has selected the Zeta 300™ series optical profiler from Zeta Instruments, Inc. for inspection and metrology of sapphire substrates to help improve wafer yield and lower costs for their LED customers.

“We have evaluated many tools for the production environment and the Zeta 300™ series, delivers the best combination of speed and accuracy for precision metrology applications,” said Raja M. Parvez, president and CEO of Rubicon Technology. “Zeta's systems are integral to assuring our products meet and surpass our own internal quality specifications and those of our customers."

The Zeta-300 series leverages Zeta’s patented Z-Dot™ technology to deliver high repeatability and accuracy for the measurement of LED-patterned/etched substrates, photo-resist and stacked structures on transparent surfaces. Regarded as having the best optics and algorithm combination, it provides rapid and reliable data acquisition and analysis. In side-to-side comparisons with competitive offerings it consistently delivers the highest repeatability and accuracy for PSS measurements in the LED industry.

Coupled with application-specific software and a companion automated wafer handler, the Zeta-380 provides imaging and measurement capabilities superior to those of laser confocal microscopes. The Zeta-380 measures and detects defects falling outside the industry certification levels that may not be detected by competing offerings. Zeta’s intuitive and innovative system design also offers a greater ease of use while lowering overall cost of ownership.